Papers for

software developers for scientific data

Papers whose findings have a practical use for this group, as judged from the abstract. Open a paper to read what it means in practice.

Process schemas unify atomic layer deposition and etching data reporting

Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science

Abstract: Atomic layer deposition (ALD) and atomic layer etching (ALE) are reported heterogeneously across experimental and simulation literature in materials science, hindering comparison and machine-actionable reuse. We present four domain-expert-reviewed JSON Schemas for ALD and ALE experimental and simulation processes. Curated with schema-miner and grounded in QUDT using schema-miner pro, the schemas structure materials, process conditions, configurations , and measured or predicted results. We compare their scope, structure, and semantic grounding, and demonstrate their use for schema-guided literature extraction and publication of structured records through ORKG templates.

Thu 10 SeptArtificial Intelligence

The gist

Atomic layer deposition and etching are important methods to build and shape very thin layers of materials, used in technology development. These processes are described in many ways across scientific papers, making comparisons and digital reuse difficult. The authors created standard templates in JSON format that organize information about these processes, including conditions and results. These templates help extract and share process data consistently, making it easier to find and use.

Open → 2609.12139v1